Development of integrated wet cleans for 3D-SIC technologies

Suhard, SamuelSamuelSuhardSimms, IhsanIhsanSimmsBrown, IanIanBrownShogo, MizotaMizotaShogoKoji, KagawaKagawaKojiClaes, MartineMartineClaesBuisson, ThibaultThibaultBuissonJourdain, AnneAnneJourdainBeyer, GeraldGeraldBeyerDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23133Development of integrated wet cleans for 3D-SIC technologiesProceedings paperhttp://www.scientific.net/SSP.195.150