Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

Popovici, Mihaela IoanaMihaela IoanaPopoviciSwerts, JohanJohanSwertsTomida, KazuyukiKazuyukiTomidaRadisic, DunjaDunjaRadisicKim, Min-SooMin-SooKimKaczer, BenBenKaczerRichard, OlivierOlivierRichardBender, HugoHugoBenderDelabie, AnneliesAnneliesDelabieMoussa, AlainAlainMoussaVrancken, ChristaChristaVranckenOpsomer, KarlKarlOpsomerFranquet, AlexisAlexisFranquetPawlak, MalgorzataMalgorzataPawlakSchaekers, MarcMarcSchaekersAltimime, LaithLaithAltimimeVan Elshocht, SvenSvenVan ElshochtKittl, JorgeJorgeKittl2021-10-192021-10-1920111862-6254https://imec-publications.be/handle/20.500.12860/19601Controlled growth of rutile TiO2 by atomic layer deposition on oxidized rutheniumJournal article10.1002/pssr.201004462http://onlinelibrary.wiley.com/doi/10.1002/pssr.201004462/full