First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers

Subramanian, SujithSujithSubramanianHosseini, MaryamMaryamHosseiniChiarella, ThomasThomasChiarellaSarkar, SatadruSatadruSarkarSchuddinck, PieterPieterSchuddinckChan, BTBTChanRadisic, DunjaDunjaRadisicMannaert, GeertGeertMannaertHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelSebaai, FaridFaridSebaaiPeter, AntonyAntonyPeterHopf, TobyTobyHopfMorin, PierrePierreMorinWang, ShouhuaShouhuaWangDevriendt, KatiaKatiaDevriendtBatuk, DmitryDmitryBatukMartinez Alanis, Gerardo TadeoGerardo TadeoMartinez AlanisVeloso, AnabelaAnabelaVelosoDentoni Litta, EugenioEugenioDentoni LittaBaudot, SylvainSylvainBaudotSiew, Yong KongYong KongSiewZhou, X.X.ZhouBriggs, BasoeneBasoeneBriggsCapogreco, ElenaElenaCapogrecoHung, JoeyJoeyHungKoret, R.R.KoretSpessot, AlessioAlessioSpessotRyckaert, JulienJulienRyckaertDemuynck, StevenStevenDemuynckHoriguchi, NaotoNaotoHoriguchiBoemmels, JuergenJuergenBoemmels2021-12-162021-11-022021-12-1620200743-1562WOS:000668063000059https://imec-publications.be/handle/20.500.12860/37747First Monolithic Integration of 3D Complementary FET (CFET) on 300mm WafersProceedings paper978-1-7281-6460-1WOS:000668063000059