Advanced high-k materials and electrical analysis for memories: the role of SiO2-high-k dielectric intermixing

Morassi, L.L.MorassiLarcher, L.L.LarcherPantisano, LuigiLuigiPantisanoPadovani, A.A.PadovaniDegraeve, RobinRobinDegraeveZahid, MohammedMohammedZahidO'Sullivan, BarryBarryO'Sullivan2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15888Advanced high-k materials and electrical analysis for memories: the role of SiO2-high-k dielectric intermixingProceedings paper