Plasma process induced damage on CMOS-integrated ion-sensitive field effect transistors

Maes, D.D.MaesVan Steenkiste, FilipFilipVan SteenkisteHaspeslagh, LucLucHaspeslaghBaert, KrisKrisBaertGumbrecht, W.W.Gumbrecht2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3643Plasma process induced damage on CMOS-integrated ion-sensitive field effect transistorsOral presentation