Ge1-xSnx stressors for strained-Ge CMOS

Takeuchi, ShotaroShotaroTakeuchiShimura, YosukeYosukeShimuraNishimura, TsuyoshiTsuyoshiNishimuraVincent, BenjaminBenjaminVincentEneman, GeertGeertEnemanClarysse, TrudoTrudoClarysseDemeulemeester, JelleJelleDemeulemeesterVantomme, AndreAndreVantommeDekoster, JohanJohanDekosterCaymax, MattyMattyCaymaxLoo, RogerRogerLooNakatsuka, OsamuOsamuNakatsukaZaima, ShigeakiShigeakiZaima2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18066Ge1-xSnx stressors for strained-Ge CMOSMeeting abstract