Trivkovic, DarkoDarkoTrivkovicJang, Il-YongIl-YongJangMeusemann, StefanStefanMeusemannWang, XiaolongXiaolongWangShi, XuelongXuelongShiMeng, RenyangRenyangMengChang, Chieh-MiaoChieh-MiaoChangBender, MarkusMarkusBenderFrangend, AndreasAndreasFrangendWang, JaneJaneWangMalacara, VictoriaVictoriaMalacaraBaskaran, BalakumarBalakumarBaskaranBekaert, JoostJoostBekaert2026-03-312026-03-312025978-1-5106-9320-30277-786Xhttps://imec-publications.be/handle/20.500.12860/58980engEnabling Curvilinear Masks: Novel Mask Qualification Methodology and Experimental VerificationProceedings paper10.1117/12.3072276WOS:001674167600021