Masolin, AlexAlexMasolinVaes, JanJanVaesDross, FredericFredericDrossPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17595Thermal curing of crystallographic defects on a SLIM-cut silicon foilProceedings paper