Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFM

Conard, ThierryThierryConardSpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32736Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFMMeeting abstract