Origin of the substrate current after soft-breakdown in thin oxide n-MOSFETs

Crupi, FeliceFeliceCrupiIannaccone, G.G.IannacconeNeri, B.B.NeriCrupi, IsodianaIsodianaCrupiDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3324Origin of the substrate current after soft-breakdown in thin oxide n-MOSFETsProceedings paper