Sequential 3D standard cell 4T architecture using design crenellation and self-aligned MOL for N2 technology and beyond

Weckx, PieterPieterWeckxChehab, BilalBilalChehabRyckaert, JulienJulienRyckaertVerkest, DiederikDiederikVerkestSpessot, AlessioAlessioSpessot2023-08-092023-08-0920200277-786XWOS:000671888300007https://imec-publications.be/handle/20.500.12860/42302Sequential 3D standard cell 4T architecture using design crenellation and self-aligned MOL for N2 technology and beyondProceedings paper10.1117/12.2552032978-1-5106-3424-4WOS:000671888300007