Leys, FrederikFrederikLeysHikavyy, AndriyAndriyHikavyyMachkaoutsan, VladimirVladimirMachkaoutsanDe Vos, BrechtBrechtDe VosGeenen, LucLucGeenenVan Daele, BennyBennyVan DaeleLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12470Low temperature epitaxy and the importance of moisture controlOral presentation