Locquet, Jean-PierreJean-PierreLocquetMarchiori, ChiaraChiaraMarchioriSousa, M.M.SousaSiegwart, H.H.SiegwartCaimi, D.D.CaimiFompeyrine, JeanJeanFompeyrinePantisano, LuigiLuigiPantisanoClaes, MartineMartineClaesConard, ThierryThierryConardDemand, MarcMarcDemandDeweerd, WimWimDeweerdDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsHoussa, MichelMichelHoussaAoulaiche, MarcMarcAoulaicheLujan, GuilhermeGuilhermeLujanRagnarsson, Lars-AkeLars-AkeRagnarssonRohr, ErikaErikaRohrSchram, TomTomSchramHooker, JacobJacobHookerRittersma, ChrisChrisRittersmaFurukawa, YukikoYukikoFurukawaSeo, J.W.J.W.Seodimoulas, A.A.dimoulas2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10800Molecular beam epitaxy for advanced gate stack materials and processesOral presentation