Birant, GizemGizemBirantKandybka, IrynaIrynaKandybkade Wild, JessicaJessicade WildBuldu, Dilara GokcenDilara GokcenBulduKohl, ThierryThierryKohlRuttens, BartBartRuttensBrammertz, GuyGuyBrammertzD'haen, JanJanD'haenMeuris, MarcMarcMeurisPoortmans, JefJefPoortmansVermang, BartBartVermang2022-09-222021-11-022022-09-2220210160-8371WOS:000701690400203https://imec-publications.be/handle/20.500.12860/37473Creating nano-sized contact openings in the thick dielectric-based passivation layers for ultrathin CIGS solar cells: A cost and time-effective approachProceedings paper10.1109/PVSC43889.2021.9518593978-1-6654-1922-2WOS:000701690400203REAR SURFACE PASSIVATION