Hantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeCelano, UmbertoUmbertoCelanoMoussa, AlainAlainMoussaArstila, KaiKaiArstilaEyben, PierrePierreEybenMajeed, BivraghBivraghMajeedSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanWerner, ThiloThiloWernerVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19041TiN scanning probes for electrical profiling of nanoelectronics device structuresOral presentation