Advancing VCSEL integration with femtosecond laser microstructuring and 3D nanoprinting

Kyriazis, AthanasiosAthanasiosKyriazisGuessoum, SalahSalahGuessoumMissinne, JeroenJeroenMissinneVirte, MartinMartinVirteVan Erps, JurgenJurgenVan ErpsVan Steenberge, GeertGeertVan Steenberge2025-07-072025-07-072025-DEC0030-3992WOS:001520235800003https://imec-publications.be/handle/20.500.12860/45881Advancing VCSEL integration with femtosecond laser microstructuring and 3D nanoprintingJournal article10.1016/j.optlastec.2025.113415WOS:0015202358000033-DIMENSIONAL MICROFABRICATIONOPTIMIZATIONPICOSECONDGLASS