Improved staggered through silicon via inductors for RF and power applications

Sun, XiaoXiaoSunVan der Plas, GeertGeertVan der PlasBeyne, EricEricBeyne2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31884Improved staggered through silicon via inductors for RF and power applicationsProceedings paperhttps://ieeexplore.ieee.org/document/8429767