A new analytic model for the description of the intrinsic oxide breakdown statistics of ultra-thin oxides

Degraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1189A new analytic model for the description of the intrinsic oxide breakdown statistics of ultra-thin oxidesJournal article