Godavarthi, SrinivasSrinivasGodavarthiLe, Quoc ToanQuoc ToanLeVerdonck, PatrickPatrickVerdonckMardani, ShabnamShabnamMardaniVanstreels, KrisKrisVanstreelsVan Besien, ElsElsVan BesienBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012-03https://imec-publications.be/handle/20.500.12860/20724Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k filmsMeeting abstract