Ackaert, JanJanAckaertVermeulen, TomTomVermeulenLowe, AntonyAntonyLoweBoonen, SylvieSylvieBoonenYao, ThierryThierryYaoPrasad, JagdishJagdishPrasadThomason, MikeMikeThomasonVan Houdt, JanJanVan HoudtDegraeve, RobinRobinDegraeveHaspeslagh, LucLucHaspeslaghHendrickx, PaulPaulHendrickx2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7116Characterization of tunnel oxides for non-volatile memory (NVM) applicationsProceedings paper