Ultra-Fine Pitch RDL (UFPRDL) using Polymer Dual Damascene processing

Pinho, NelsonNelsonPinhoChery, EmmanuelEmmanuelCheryPantano, NicolasNicolasPantanoSlabbekoorn, JohnJohnSlabbekoornMiller, AndyAndyMillerBeyne, EricEricBeyne2023-11-222023-10-232023-11-2220230569-5503WOS:001047624100225https://imec-publications.be/handle/20.500.12860/42910Ultra-Fine Pitch RDL (UFPRDL) using Polymer Dual Damascene processingProceedings paper10.1109/ECTC51909.2023.00233979-8-3503-3498-2WOS:001047624100225RELIABILITY