Lauwers, AnneAnneLauwersKittl, JorgeJorgeKittlVan Dal, MarkMarkVan DalChamirian, OxanaOxanaChamirianKmieciak, MalgorzataMalgorzataKmieciakTorregiani, CristinaCristinaTorregianiLiu, J.J.LiuBenedetti, AlessandroAlessandroBenedettiRichard, OlivierOlivierRichardBender, HugoHugoBendervan Berkum, J.G.M.J.G.M.van BerkumKaiser, M.M.KaiserVeloso, AnabelaAnabelaVelosoKottantharayil, AnilAnilKottantharayilde Potter de ten Broeck, MurielMurielde Potter de ten BroeckMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10754Silicides for advanced CMOS devicesProceedings paper