Ivankovic, AndrejAndrejIvankovicCherman, VladimirVladimirChermanVan der Plas, GeertGeertVan der PlasVandevelde, BartBartVandeveldeBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneDe Wolf, IngridIngridDe WolfVandepitte, DirkDirkVandepitte2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20851FET arrays as CPI sensors for 3D stacking and packaging characterizationProceedings paper