Sreeprasanth Pulinthanathu, SreeSreeSreeprasanth PulinthanathuDendooven, JolienJolienDendoovenJammaer, JasperJasperJammaerMasschaele, KasperKasperMasschaeleDeduytsche, DavyDavyDeduytscheD'Haen, JanJanD'HaenKirschhock, ChristineChristineKirschhockMartens, Johan A.Johan A.MartensDetavernier, ChristopheChristopheDetavernier2021-10-202021-10-2020120897-4756https://imec-publications.be/handle/20.500.12860/21540Anisotropic atomic layer deposition profiles of TiO2 in hierarchical silica materials with multiple porosityJournal article