Eusner, T.T.EusnerSaka, N.N.SakaChun, J.H.J.H.ChunArmini, SilviaSilviaArminiMoinpour, M.M.MoinpourFischer, P.P.Fischer2021-10-172021-10-1720090013-4651https://imec-publications.be/handle/20.500.12860/15286Controlling scratching in Cu chemical Journalmechanical planarizationJournal article