Van Look, LieveLieveVan LookPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenbergheDavydova, NataliaNataliaDavydovaWittebrood, FrisoFrisoWittebroodDe Kruif, RobertRobertDe KruifVan Oosten, AntonAntonVan OostenMiyazaki, JunjiJunjiMiyazakiFliervoet, TimonTimonFliervoetVan Schoot, JanJanVan SchootNeumann, Jens TimoJens TimoNeumann2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26086Alternative EUV mask technology to compensate for mask 3D effectsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2397267