An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology

Rottenberg, XavierXavierRottenbergBrebels, StevenStevenBrebelsEkkels, PhillipPhillipEkkelsCzarnecki, PiotrPiotrCzarneckiNolmans, PhilipPhilipNolmansMertens, RobertRobertMertensNauwelaers, BartBartNauwelaersPuers, BobBobPuersDe Wolf, IngridIngridDe WolfDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162007-07https://imec-publications.be/handle/20.500.12860/12810An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technologyJournal article