Temperature coefficient of resistance and thermal boundary conductance determination of ruthenium thin films by micro four-point probe

Beltran-Pitarch, BraulioBraulioBeltran-PitarchGuralnik, BennyBennyGuralnikBorup, Kasper A.Kasper A.BorupAdelmann, ChristophChristophAdelmannHansen, OleOleHansenPryds, NiniNiniPrydsPetersen, Dirch H.Dirch H.Petersen2025-04-282024-04-092025-04-2820240957-0233WOS:001195467600001https://imec-publications.be/handle/20.500.12860/43805Temperature coefficient of resistance and thermal boundary conductance determination of ruthenium thin films by micro four-point probeJournal article10.1088/1361-6501/ad366bWOS:001195467600001RELIABILITY