Design method for the integration of DSA via patterning in sub-7 nm circuits

Karageorgos, IoannisIoannisKarageorgosRyckaert, JulienJulienRyckaertCroes, KrisKrisCroesTung, C. MaryannC. MaryannTungWong, H. -S. PhilipH. -S. PhilipWongKarageorgos, EvangelosEvangelosKarageorgosGronheid, RoelRoelGronheidBekaert, JoostJoostBekaertVandenberghe, GeertGeertVandenbergheStucchi, MicheleMicheleStucchiDehaene, WimWimDehaene2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26805Design method for the integration of DSA via patterning in sub-7 nm circuitsOral presentation