Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices

Crotti, DavideDavideCrottiSwerts, JohanJohanSwertsYasin, FarrukhFarrukhYasinJossart, NicoNicoJossartSouriau, LaurentLaurentSouriauKundu, ShreyaShreyaKunduUrenski, RonenRonenUrenskiUrbanowicz, Adam M.Adam M.UrbanowiczKoret, RoyRoyKoretFigueiro, NiveaNiveaFigueiroSendelbach, MatthewMatthewSendelbachLee, Wei TiWei TiLeeShah, KavitaKavitaShahLarson, TomTomLarsonGer, AvronAvronGerWolfling, ShayShayWolflingKar, Gouri SankarGouri SankarKar2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30476Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devicesOral presentation