Rusu, CristinaCristinaRusuVerbist, AgnesAgnesVerbistParmentier, BrigitteBrigitteParmentierWitvrouw, AnnAnnWitvrouw2021-10-142021-10-142002-09https://imec-publications.be/handle/20.500.12860/6780MEMS 0-level packaging using thin film poly-SiGe capsProceedings paper