Low-k dielectric reliability: impact of test structure choice, copper and integrated dielectric quality

Tokei, ZsoltZsoltTokeiLi, YunlongYunlongLiCiofi, IvanIvanCiofiCroes, KristofKristofCroesBeyer, GeraldGeraldBeyer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14566Low-k dielectric reliability: impact of test structure choice, copper and integrated dielectric qualityProceedings paper