A methodology for the characterization of topography induced immersion bubble defects

Kocsis, MichaelMichaelKocsisDe Bisschop, PeterPeterDe BisschopMaenhoudt, MireilleMireilleMaenhoudtKim, Young-ChangYoung-ChangKimWells, GregGregWellsList, ScottScottListDiBiase, TonyTonyDiBiase2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10717A methodology for the characterization of topography induced immersion bubble defectsProceedings paper