Tous, LoicLoicTousLerat, Jean-FrancoisJean-FrancoisLeratEmeraud, ThierryThierryEmeraudNegru, R.R.NegruHuet, KarimKarimHuetRussell, RichardRichardRussellJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21629Progress in nickel silicide formation using excimer laser thermal annealingMeeting abstract