Pobedinskas, PauliusPauliusPobedinskasDegutis, GiedriusGiedriusDegutisDexters, WimWimDextersHardy, AnAnHardyVan Bael, MarliesMarliesVan BaelHaenen, KenKenHaenen2021-10-222021-10-2220140003-6951https://imec-publications.be/handle/20.500.12860/24391Influence of hydrogen and hydrogen/methane plasmas on AlN thin filmsJournal articlehttp://scitation.aip.org/content/aip/journal/apl/104/8/10.1063/1.4867022