Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2

Zhang, HaodongHaodongZhangChiappe, DanieleDanieleChiappeMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardFranquet, AlexisAlexisFranquetNuytten, ThomasThomasNuyttenMannarino, ManuelManuelMannarinoRadu, IulianaIulianaRaduVandervorst, WilfriedWilfriedVandervorstDelabie, AnneliesAnneliesDelabie2021-10-242021-10-2420170021-9606https://imec-publications.be/handle/20.500.12860/30015Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2Journal articlehttp://aip.scitation.org/doi/full/10.1063/1.4967406