Nanotechnology – can 0D, 1D and 2D processes enable 3D CMOS applications?

De Gendt, StefanStefanDe GendtChiodarelli, NicoloNicoloChiodarelliCott, DaireDaireCottvan der Veen, MarleenMarleenvan der VeenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16944Nanotechnology – can 0D, 1D and 2D processes enable 3D CMOS applications?Proceedings paper