Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS

Kayser, SvenSvenKayserPirkl, AlexanderAlexanderPirklZakel, JuliaJuliaZakelFranquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinato2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33260Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMSProceedings paper