Kraus, HaraldHaraldKrausSnow, JimJimSnowVan Doorne, PatrickPatrickVan DoorneFyen, WimWimFyenMertens, PaulPaulMertensKovacs, FredericFredericKovacs2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9148Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2Proceedings paper