Angular and strain dependence of heavy-ions induced degration in SOI FinFETs

Griffoni, AlessioAlessioGriffoniGerardin, SimoneSimoneGerardinMeneghesso, GaudenzioGaudenzioMeneghessoPaccagnella, AlessandroAlessandroPaccagnellaSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-1820100018-9499https://imec-publications.be/handle/20.500.12860/17190Angular and strain dependence of heavy-ions induced degration in SOI FinFETsJournal article