Defect distribution in InP epitaxially grown in nano-trenches on off-axis Si substrates

Bender, HugoHugoBenderRichard, OlivierOlivierRichardJiang, SijiaSijiaJiangMerckling, ClementClementMercklingLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20354Defect distribution in InP epitaxially grown in nano-trenches on off-axis Si substratesProceedings paper