On the extraction of resistivity and area of nanoscale interconnect lines by temperature-dependent resistance measurements

Adelmann, ChristophChristophAdelmann2021-10-272021-10-2720190038-1101https://imec-publications.be/handle/20.500.12860/32404On the extraction of resistivity and area of nanoscale interconnect lines by temperature-dependent resistance measurementsJournal articlehttps://doi.org/10.1016/j.sse.2018.12.005