Defect identification in bonding surface layer by positron annihilation spectroscopy

Inoue, FumihiroFumihiroInouePeng, LanLanPengIacovo, SerenaSerenaIacovoNagano, FuyaFuyaNaganoSleeckx, ErikErikSleeckxBeyer, GeraldGeraldBeyerUedono, AkiraAkiraUedonoBeyne, EricEricBeyne2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33195Defect identification in bonding surface layer by positron annihilation spectroscopyProceedings paperhttps://ieeexplore.ieee.org/document/8735141