De Simone, DaniloDaniloDe SimoneVesters, YannickYannickVestersVandenberghe, GeertGeertVandenberghe2021-10-252021-10-2520180914-9244https://imec-publications.be/handle/20.500.12860/30554The path to better understanding stochastics in EUV photoresistJournal articlehttps://doi.org/10.2494/photopolymer.31.651