Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers

Loucif Seiad, MohamedMohamedLoucif SeiadSingh, ArjunArjunSinghMKuppuswamy, Vijaya KumarVijaya KumarMKuppuswamyFerhat, MarhounMarhounFerhatGronheid, RoelRoelGronheid2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24170Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafersMeeting abstract