High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy

Eyben, PierrePierreEybenFukutome, H.H.FukutomeAlvarez, DavidDavidAlvarezVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8896High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopyProceedings paper