Tokei, ZsoltZsoltTokeiRoussel, PhilippePhilippeRousselStucchi, MicheleMicheleStucchiVersluijs, JankoJankoVersluijsCiofi, IvanIvanCiofiCarbonell, LaureLaureCarbonellBeyer, GeraldGeraldBeyerCockburn, AndrewAndrewCockburnAugustin, M.M.AugustinShah, KavitaKavitaShah2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16313Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validationProceedings paper