A Statistical Approach for Evaluating the Spatial Distribution and Local Atomic Environment of Dopants Using Atom Probe Tomography

Lin, Jhao-RongJhao-RongLinMorris, RichardRichardMorrisScheerder, JeroenJeroenScheerderHikavyy, AndriyAndriyHikavyyPorret, ClémentClémentPorretVantomme, AndreAndreVantommeFleischmann, ClaudiaClaudiaFleischmann2026-01-272026-01-2720251431-9276https://imec-publications.be/handle/20.500.12860/58753engA Statistical Approach for Evaluating the Spatial Distribution and Local Atomic Environment of Dopants Using Atom Probe TomographyJournal article10.1093/mam/ozaf114WOS:001612952900001MEDLINE:41222977