Selvaraja, ShankarShankarSelvarajaMurdoch, GayleGayleMurdochMilenin, AlexeyAlexeyMileninDelvaux, ChristieChristieDelvauxOng, PatrickPatrickOngPathak, ShibnathShibnathPathakVermeulen, DiedrikDiedrikVermeulenSterckx, GuntherGuntherSterckxWinroth, GustafGustafWinrothVerheyen, PeterPeterVerheyenLepage, GuyGuyLepageBogaerts, WimWimBogaertsBaets, RoelRoelBaetsVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsil2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21487Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errorsProceedings paper