Integrated silicon nitride electro-optic modulators with atomic layer deposited overlays

Hermans, ArturArturHermansVan Daele, MichielMichielVan DaeleDendooven, JolienJolienDendoovenClemmen, StephaneStephaneClemmenDetavernier, ChristopheChristopheDetavernierBaets, RoelRoelBaets2021-10-272021-10-272019-030146-9592https://imec-publications.be/handle/20.500.12860/33132Integrated silicon nitride electro-optic modulators with atomic layer deposited overlaysJournal articlehttps://doi.org/10.1364/OL.44.001112